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Filmetrics systems are heavily used in MEMS applications. Our F20 and F50 systems are used during MEMS patterning processes to measure thick photoresist (such as SU-8) thickness and uniformity. These systems are also being used during silicon etching to measure etch rate and membrane thickness and uniformity. Thickness measurement of thick polysilicon films and SOI are also common applications.
Contact Dr. Charles Chen or any of our other thin-film experts to discuss your MEMS or thick silicon application.
Filmetrics offers free trial measurements – results are typically available in 1-2 days |
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