Thin-Film Measurement by Filmetrics
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Filmetrics offers a full range of products for measuring any non-metallic semiconductor process film.

The F20 is the most affordable solution for single-spot measurements of thickness and index.

For small-spot-size thickness measurements (down to 2.5 microns or less), the F40 will attach to your microscope.

For affordable automated point-by-point thickness mapping of blanket films, try the F50.The F80 maps film thickness on product wafers.

Our patented Thickness Imaging technology results in easier set up, fewer recipes, more robust pattern recognition, and much lower cost than conventional thin-film metrology tools. Both stand alone and integrated versions are available.





Contact Dr. Charles Chen or any of our other thin-film experts to discuss your semiconductor process film application.

Filmetrics offers free trial measurements
results are typically available in 1-2 days
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